JPH0233863Y2 - - Google Patents

Info

Publication number
JPH0233863Y2
JPH0233863Y2 JP1984076350U JP7635084U JPH0233863Y2 JP H0233863 Y2 JPH0233863 Y2 JP H0233863Y2 JP 1984076350 U JP1984076350 U JP 1984076350U JP 7635084 U JP7635084 U JP 7635084U JP H0233863 Y2 JPH0233863 Y2 JP H0233863Y2
Authority
JP
Japan
Prior art keywords
waste gas
valve plate
adsorption
desorption
annular groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984076350U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60189317U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7635084U priority Critical patent/JPS60189317U/ja
Publication of JPS60189317U publication Critical patent/JPS60189317U/ja
Application granted granted Critical
Publication of JPH0233863Y2 publication Critical patent/JPH0233863Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Multiple-Way Valves (AREA)
  • Separation Of Gases By Adsorption (AREA)
JP7635084U 1984-05-23 1984-05-23 廃ガスの吸着浄化装置における切替ダンパ−装置 Granted JPS60189317U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7635084U JPS60189317U (ja) 1984-05-23 1984-05-23 廃ガスの吸着浄化装置における切替ダンパ−装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7635084U JPS60189317U (ja) 1984-05-23 1984-05-23 廃ガスの吸着浄化装置における切替ダンパ−装置

Publications (2)

Publication Number Publication Date
JPS60189317U JPS60189317U (ja) 1985-12-14
JPH0233863Y2 true JPH0233863Y2 (en]) 1990-09-11

Family

ID=30618405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7635084U Granted JPS60189317U (ja) 1984-05-23 1984-05-23 廃ガスの吸着浄化装置における切替ダンパ−装置

Country Status (1)

Country Link
JP (1) JPS60189317U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006132318A1 (ja) * 2005-06-10 2006-12-14 Tokyo Electron Limited 弁体、バルブ、切替えバルブおよびトラップ装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5310431U (en]) * 1976-07-09 1978-01-28
JPS5382663A (en) * 1976-12-28 1978-07-21 Toyobo Co Ltd Combinated adsorption and desorption apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006132318A1 (ja) * 2005-06-10 2006-12-14 Tokyo Electron Limited 弁体、バルブ、切替えバルブおよびトラップ装置

Also Published As

Publication number Publication date
JPS60189317U (ja) 1985-12-14

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